We manufacture evaporation boats made of tungsten, molybdenum, molybdenum-lanthanum (ML), molybdenum-yttrium oxide (MY), or tantalum for the resistance evaporation process. When current is applied, our boats heat the material to be evaporated. The low vapor pressures of our metals ensure that no tungsten, tantalum, or molybdenum particles enter the vapor and the final layer.
Excellent
corrosion resistance
Low vapor pressures
Good electrical conductivity
Very high melting point
Dimensional stability
The thermal vacuum evaporation process (resistance evaporation) is a coating method and is one of the PVD (physical vapor deposition) processes. The material for the final layer is heated inside a vacuum chamber until it evaporates.
During the vacuum evaporation process, durable layers are produced from aluminum, silver, chromium, titanium nitride, or silica, for example. The result is sparkling watches, flawless mirrors, and high-quality electronic components. Also impressive are the long service life and high dimensional accuracy of our evaporation boats.
We produce evaporation boats made of molybdenum, tungsten, and tantalum for your application:
Tungsten evaporation boats
Tungsten is highly corrosion-resistant compared with many molten metals and, with the highest melting point of all metals, is extremely heat-resistant. We make the material even more corrosion-resistant and dimensionally stable by means of special dopants such as potassium silicate.
Molybdenum evaporation boats
Molybdenum is a particularly stable metal and is also suitable for high temperatures. Doped with lanthanum oxide (ML), molybdenum is even more ductile and corrosion-resistant. We add yttrium oxide (MY) to improve the mechanical workability of molybdenum
Tantalum evaporation boats
Tantalum has a very low vapor pressure and a low evaporation speed. What is most impressive about this material, however, is its high corrosion resistance.
Straight type – straight boats
Step type – boats with a step between the clamping part and upper part
Non-splash type – boats with wings or a cover to minimize splashes
Eine Übersicht der passenden Schiffchen für Ihr Material finden Sie hier. Schiffchen mit einem Plus eignen sich für das Material. Schiffchen mit zwei Plus empfehlen wir Ihnen ganz besonders. Gerne helfen wir Ihnen auch persönlich bei der Materialauswahl.
Beschichtungsmaterial | Dichte [g/cm³] |
Schmelzpunkt [°C] |
Siedepunkt [°C] |
Schiffchen | ||
W | Mo | Ta | ||||
Al | 2.7 | 660 | 2467 | + | ||
AIF3 | 2.9 | 1291 | N/A | ++ | ++ | |
AI/1 – 4% Cu | 2.7 | 650 | N/A | + | ||
AI/0.1 – 2% Si | 2.7 | 640 | N/A | + | ||
AI/4% Cu/1% Si | 2.7 | 640 | N/A | + | ||
Ag | 10.5 | 961 | 2212 | ++ | ++ | |
As2S3 | 3.4 | 300 | 707 | ++ | ||
Au | 19.3 | 1063 | 2966 | ++ | + | |
B2O3 | 2.5 | 460 | 2247 | ++ | ||
BaF2 | 4.9 | 1280 | 2260 | ++ | ++ | ++ |
BaTiO3 | 6.0 | 1600 | N/A | + | + | |
BeO | 3.0 | 2530 | 4120 | + | ||
Bi | 9.8 | 271 | 1560 | ++ | ++ | ++ |
BiF3 | 5.3 | 727 | 900 | ++ | ++ | |
Bi2O3 | 8.9 | 820 | 1890 | + | + | |
CaF2 | 3.2 | 1360 | 2500 | ++ | ++ | ++ |
CaO | 3.3 | 2580 | 2850 | + | ||
Cd | 8.6 | 321 | 765 | ++ | ++ | ++ |
CdSe | 5.8 | 1350 | N/A | ++ | ++ | |
CdS | 4.8 | 1750 | 1405 | ++ | ++ | ++ |
CdTe | 6.2 | 1042 | N/A | ++ | ++ | |
CeO2 | 7.1 | 2150 | N/A | ++ | ||
CeF3 | 6.2 | 1460 | 1987 | ++ | ++ | |
Co | 8.9 | 1495 | 2900 | + | ++ | |
Cr | 7.2 | 1875 | 2482 | ++ | ||
Cr2C3 | 6.7 | 1850 | 3800 | + | ||
Cr2C3 | 5.2 | 2345 | 4000 | + | ||
Cu | 8.9 | 1083 | 2595 | ++ | ||
Cu2O | 6.0 | 1235 | 1800 | + | ||
DyF3 | 7.5 | 1155 | 1900 | ++ | ||
ErF3 | 7.8 | 1144 | 1920 | ++ | ||
Er2O3 | 8.6 | 2400 | N/A | + | ||
EuF3 | 6.7 | 1280 | 2270 | + | ||
Eu2O3 | 7.4 | 2100 | N/A | + | ||
Fe | 7.9 | 1536 | 3070 | + | ||
Fe2O3 | 5.3 | 1594 | N/A | + | ||
Ga | 5.9 | 30 | 2403 | + | ||
GaAs | 5.3 | 1238 | N/A | ++ | ||
GaP | 4.1 | 1350 | N/A | ++ | ++ | ++ |
Ge | 5.4 | 937 | 2830 | + | ||
GeO2 | 4.2 | 1115 | N/A | ++ | ++ | ++ |
HfF2 | 7.1 | 1000 | N/A | ++ | ||
HoF3 | 7.6 | 1143 | 1895 | ++ | ||
In | 7.3 | 156 | 2000 | ++ | ++ | |
In/10Sn | 7.3 | 146 | 1000 | + | ||
In2O3 | 7.2 | 2200 | N/A | + | + | |
LaF3 | 6.0 | 1495 | 2400 | ++ | ++ | |
La2O3 | 6.5 | 2260 | 4200 | + | + | |
LiF | 2.6 | 842 | 1676 | ++ | ++ | |
LuF3 | 8.3 | 1182 | 2200 | ++ | ++ | |
Lu2O3 | 9.4 | 2400 | N/A | + | ++ | |
Mg | 1.7 | 650 | 1107 | ++ | ++ | ++ |
MgF2 | 3.1 | 1266 | 2239 | ++ | ||
MgO | 3.6 | 2640 | 3600 | + | ||
Mn | 7.4 | 1245 | 2097 | + | ++ | ++ |
MnS | 4.0 | 1615 | N/A | + | + | |
MoO3 | 4.7 | 795 | 1155 | ++ | ||
MoS2 | 4.8 | 1185 | N/A | ++ | ||
Na3AIF6 | 2.9 | 1000 | N/A | ++ | ++ | |
Na5AI3F14 | 3.0 | 1027 | N/A | ++ | ++ | |
NaF | 2.6 | 988 | 1695 | ++ | ++ | ++ |
NdF3 | 6.5 | 1377 | 2400 | ++ | ++ | |
Nd2O3 | 7.2 | 2240 | N/A | + | ||
Ni | 8.9 | 1453 | 2732 | + | ||
Ni/Cr | 7.5-8.5 | 1500 | N/A | + | ||
Nb | 8.6 | 2468 | 4927 | + | ||
Nb2O5 | 4.5 | 1512 | N/A | + | ||
Pd | 12.0 | 1552 | 2927 | + | ||
Pt | 21.5 | 1769 | 3827 | + | ||
PrF3 | 6.3 | 1399 | 2255 | ++ | ++ | |
Pr2O3 | 7.1 | 2270 | N/A | + | ||
Rb | 1.5 | 39 | 688 | + | ||
SmF2 | 6.6 | 1306 | 2323 | ++ | ||
Sm2O3 | 7.1 | 2325 | N/A | + | ||
ScF3 | 2.6 | 1530 | 1800 | ++ | ||
Sc2O3 | 3.9 | 2400 | N/A | + | ||
Se | 4.8 | 217 | 685 | + | + | + |
Si | 2.3 | 1410 | 2355 | + | ||
SiO | 2.1 | 1705 | 1880 | ++ | ++ | |
Sn | 7.3 | 232 | 2260 | ++ | ++ | |
SnO2 | 6.9 | 1127 | 1850 | + | + | |
SrF2 | 4.2 | 1450 | 2489 | ++ | ++ | |
Ta2O5 | 8.3 | 1880 | N/A | + | ||
Te | 6.2 | 450 | 1390 | ++ | ++ | ++ |
TbF3 | 7.2 | 1172 | 2280 | + | ||
Tb2O3 | 7.9 | 2300 | N/A | + | + | |
ThF4 | 6.3 | 1100 | 1680 | ++ | ++ | |
Ti | 4.5 | 1668 | 3260 | + | ||
TiO2 | 4.2 | 1775 | 2700 | + | ||
TiO | 4.9 | 1750 | 3000 | ++ | ||
Ti2O3 | 4.6 | 1760 | N/A | ++ | ||
V | 6.1 | 1900 | 3410 | + | + | |
WO3 | 7.2 | 1473 | N/A | ++ | ||
Y | 4.5 | 1509 | 2927 | ++ | ||
YF3 | 5.1 | 1155 | 2210 | ++ | ||
YbF3 | 8.2 | 1157 | 2136 | ++ | ++ | |
Yb2O3 | 9.2 | 2346 | N/A | + | ||
Zn | 7.1 | 420 | 907 | ++ | ++ | ++ |
ZnSe | 5.4 | 1526 | N/A | ++ | ++ | ++ |
ZnS | 4.1 | 1850 | 1665 | ++ | ++ | |
ZnTe | 5.5 | 1238 | N/A | ++ | ++ | |
Zr | 6.5 | 1852 | 3578 | + | ||
ZrF4 | 4.4 | 600 | 908 | ++ | ||
ZrO2 | 5.6 | 2700 | 4300 | + | ||
ZrO | 6.4 | 2200 | N/A | ++ |
The exact dimensions can be found in our shop:
Our materials for evaporation boats have a very low evaporation speed at evaporation temperature and an extremely low vapor pressure compared with the coating materials. This means that no boat material enters the layer, even in the case of long evaporation cycles.
The specific electrical resistance is an important variable when it comes to the design of evaporation boats.
More detailed information regarding our tungsten, molybdenum, and tantalum evaporation boats can be derived from the item number. This is formulated as follows:
We provide crucible inserts made of molybdenum, tungsten, and tantalum for electron beam evaporation. Unlike copper and graphite crucibles, these do not contaminate your evaporation material. We'll be happy to optimize the geometry and material composition of our crucibles to suit your coating process.
Our tungsten and molybdenum filaments are used in electronic resistance evaporation.